Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147605 | Process of producing epitaxial substrate | Hajime Matsuda | 2018-12-04 |
| 10109482 | Method for treating surface of semiconductor layer, semiconductor substrate, method for making epitaxial substrate | — | 2018-10-23 |
| 10056252 | Process of forming nitride semiconductor layers | Hajime Matsuda | 2018-08-21 |