Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977324 | Phase shift mask and method of forming patterns using the same | Dongeon LEE, Min Kang, Bong-Yeon Kim, Junhyuk Woo, Hyunjoo Lee +1 more | 2018-05-22 |
| 9885950 | Phase shift mask, method for manufacturing the same, and method for forming micro pattern | Min Kang, Bong-Yeon Kim, Hyun Joo Lee, Jin-Ho Ju | 2018-02-06 |