Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977324 | Phase shift mask and method of forming patterns using the same | Dongeon LEE, Min Kang, Yong-Duck Son, Junhyuk Woo, Hyunjoo Lee +1 more | 2018-05-22 |
| 9885950 | Phase shift mask, method for manufacturing the same, and method for forming micro pattern | Yong-Duck Son, Min Kang, Hyun Joo Lee, Jin-Ho Ju | 2018-02-06 |
| 9869027 | Cleaning composition and method of manufacturing metal wiring using the same | Jin-Ho Ju, Jun Hyuk WOO, Jung Hwan Song, Seok-Ho Lee, Seong-Sik Jeon +1 more | 2018-01-16 |