Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126642 | Reflective photomask, method of fabricating the same, and exposure apparatus using the reflective photomask | Insung Kim | 2018-11-13 |
| 9996001 | Reticle and exposure apparatus including the same | Insung Kim | 2018-06-12 |