Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126642 | Reflective photomask, method of fabricating the same, and exposure apparatus using the reflective photomask | Seongsue Kim | 2018-11-13 |
| 9996001 | Reticle and exposure apparatus including the same | Seongsue Kim | 2018-06-12 |
| 9857690 | Extreme ultraviolet generation device and exposure system including the same | Hoyeon Kim, Jinseok Heo | 2018-01-02 |