Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048589 | Field guided post exposure bake application for photoresist microbridge defects | Ludovic Godet, Christine Y Ouyang | 2018-08-14 |
| 9996006 | Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake | Christine Y Ouyang, Ludovic Godet | 2018-06-12 |
| 9927709 | Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake | Christine Y Ouyang, Ludovic Godet | 2018-03-27 |
| 9864276 | Laser annealing and electric field | Christine Y Ouyang, Ludovic Godet | 2018-01-09 |