Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D830981 | Susceptor for semiconductor substrate processing apparatus | Jeung Hoon Han, Young Seok Choi, Ju Hyuk Park | 2018-10-16 |
| 10060031 | Deposition apparatus and cleansing method using the same | Dae Youn Kim, Hyun Soo Jang, Young-Hoon Kim, Jeong Ho Lee | 2018-08-28 |
| 9879342 | Lateral flow atomic layer deposition apparatus and atomic layer deposition method using the same | Woo Chan Kim, Jeong Ho Lee, Hyun Soo Jang | 2018-01-30 |