Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D830981 | Susceptor for semiconductor substrate processing apparatus | Sang Jin Jeong, Young Seok Choi, Ju Hyuk Park | 2018-10-16 |
| 9960073 | Substrate processing apparatus and substrate processing method | Song Whe Huh | 2018-05-01 |