Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897554 | Method of inspecting surface and method of inspecting photomask using the same | Ji Hoon Na, Dong Gun Lee, Byung-Gook Kim | 2018-02-20 |
| 9892884 | Exposure apparatus and method of manufacturing semiconductor device | Byoung-Sup Ahn, Dong Gun Lee, Su-Young Lee | 2018-02-13 |