Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996009 | Extreme ultraviolet (EUV) exposure system and method of manufacturing semiconductor device using the same | Chang-Min Park, Ji Sun Lee | 2018-06-12 |
| 9874809 | Pellicle for a reflective mask and reflective mask assembly including the same | Chang-Min Park, Jin Hong Park | 2018-01-23 |