Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128126 | Method of doping 2-dimensional semiconductor | Hyung Youl Park | 2018-11-13 |
| 9874809 | Pellicle for a reflective mask and reflective mask assembly including the same | Chang-Min Park, Myung-soo Hwang | 2018-01-23 |
| 9867267 | Extreme ultraviolet light source device | Seung-Koo Lee, In-Sung Kim | 2018-01-09 |