Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087348 | Pellicle including a water-soluble adhesive and photomask assembly including the pellicle | Byungchul Yoo, Sungyong Cho, Jeongsu Yang, Donghoon Chung, Han-shin Lee +5 more | 2018-10-02 |
| 9952502 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Munja Kim, Sungwon Kwon, Byunggook Kim, Roman Chalykh +1 more | 2018-04-24 |