Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115562 | Systems including a beam projection device providing variable exposure duration resolution | Suyoung Lee, Tamamushi Shuichi, Byoungsup Ahn | 2018-10-30 |
| 9952502 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Munja Kim, Sungwon Kwon, Roman Chalykh, Yongseok Jung +1 more | 2018-04-24 |