Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056229 | Charged-particle beam exposure method and charged-particle beam correction method | Sukjong Bae, Myoungsoo Lee | 2018-08-21 |
| 10007185 | Electron beam lithography method and apparatus | Sook Hyun Lee, Jin Choi, Sinjeung Park, Seombeom Kim | 2018-06-26 |