Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10012900 | Method of correcting mask pattern and method of manufacturing reticle | Jong Su Kim, Shuichi Tamamushi, In-Kyun Shin, Sung Il Lee | 2018-07-03 |
| 10007185 | Electron beam lithography method and apparatus | Sook Hyun Lee, Sinjeung Park, Seombeom Kim, Inkyun SHIN | 2018-06-26 |