Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109468 | Sputtering target | Peter Polcik, SABINE WOERLE, Juerg Hagmann | 2018-10-23 |
| 10060026 | High-power pulse coating method | Denis Kurapov | 2018-08-28 |
| 10053769 | Target preparation | Denis Kurapov | 2018-08-21 |
| 10032610 | Plasma source | Juerg Hagmann | 2018-07-24 |
| 9957600 | Target age compensation method for performing stable reactive sputtering processes | Denis Kurapov | 2018-05-01 |
| 9934951 | Target adapted to an indirect cooling device | Juerg Hagmann | 2018-04-03 |
| 9906210 | Method for providing sequential power pulses | Daniel Lendi, Markus Lechthaler | 2018-02-27 |