Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109468 | Sputtering target | Peter Polcik, SABINE WOERLE, Siegfried Krassnitzer | 2018-10-23 |
| 10032610 | Plasma source | Siegfried Krassnitzer | 2018-07-24 |
| 9934951 | Target adapted to an indirect cooling device | Siegfried Krassnitzer | 2018-04-03 |