Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132413 | Gas inlet valve with incompatible materials isolation | Gary Lind | 2018-11-20 |
| 10113232 | Azimuthal mixer | Mohamed Shihaam Suhail, Ravi Bharatkumar Parmar, David Cohen | 2018-10-30 |
| 10090174 | Apparatus for purging semiconductor process chamber slit valve opening | Peter Krotov | 2018-10-02 |
| 9918376 | Hybrid impedance matching for inductively coupled plasma system | George Thomas, Francisco Juarez | 2018-03-13 |