Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132413 | Gas inlet valve with incompatible materials isolation | Panya Wongsenakhum | 2018-11-20 |
| 9964332 | Systems and methods for bulk vaporization of precursor | — | 2018-05-08 |
| 9951421 | Inlet for effective mixing and purging | — | 2018-04-24 |