Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109476 | Substrate processing method for depositing a barrier layer to prevent photoresist poisoning | David Cheung | 2018-10-23 |
| 10068781 | Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma | Stephen M. Sirard, Jeff Hahn | 2018-09-04 |