SS

Stephen M. Sirard

Lam Research: 2 patents #97 of 426Top 25%
🗺 Texas: #2,683 of 15,368 inventorsTop 20%
Overall (2018): #100,022 of 503,207Top 20%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10068781 Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma Ilia Kalinovski, Jeff Hahn 2018-09-04
10008396 Method for collapse-free drying of high aspect ratio structures Ratchana Limary 2018-06-26