Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10065208 | Discharge determination method and discharge apparatus | — | 2018-09-04 |
| 9975247 | Position detection apparatus, substrate processing apparatus, position detection method and substrate processing method | Hiroaki KAKUMA, Hiroshi Sano | 2018-05-22 |