Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9975247 | Position detection apparatus, substrate processing apparatus, position detection method and substrate processing method | Yuji Okita, Hiroaki KAKUMA | 2018-05-22 |
| 9887106 | Ejection inspection apparatus and substrate processing apparatus | Itaru Furukawa | 2018-02-06 |