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Yi-Hsiuan Yu

NT National Chung Shan Institute Of Science And Technology: 1 patents #16 of 77Top 25%
📍 Zhubei City, TW: #91 of 249 inventorsTop 40%
Overall (2018): #184,548 of 503,207Top 40%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9972520 Aluminum nitride electrostatic chuck used in high temperature and high plasma power density semiconductor manufacturing process Yang-Kuao Kuo, Jian Ruan 2018-05-15