Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972520 | Aluminum nitride electrostatic chuck used in high temperature and high plasma power density semiconductor manufacturing process | Yi-Hsiuan Yu, Jian Ruan | 2018-05-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972520 | Aluminum nitride electrostatic chuck used in high temperature and high plasma power density semiconductor manufacturing process | Yi-Hsiuan Yu, Jian Ruan | 2018-05-15 |