Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134613 | Cluster tool apparatus and a method of controlling a cluster tool apparatus | Mengchu Zhou, Naiqi Wu, Zhiwu Li, Qinghua Zhu | 2018-11-20 |
| 10101721 | System and method for determining an optimized schedule of a production line | Naiqi Wu, Fajun Yang, Mengchu Zhou | 2018-10-16 |
| 10073444 | Petri net-based optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools | Naiqi Wu, Fajun Yang, Mengchu Zhou | 2018-09-11 |
| 10001772 | Optimally scheduling of close-down process for single-arm cluster tools with wafer residency time constraints | Naiqi Wu, Qinghua Zhu, Mengchu Zhou | 2018-06-19 |
| 10001773 | Optimal one-wafer scheduling of single-arm multi-cluster tools with tree-like topology | Naiqi Wu, Qinghua Zhu, Mengchu Zhou | 2018-06-19 |