Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134613 | Cluster tool apparatus and a method of controlling a cluster tool apparatus | Yan Qiao, Mengchu Zhou, Naiqi Wu, Zhiwu Li | 2018-11-20 |
| 10001772 | Optimally scheduling of close-down process for single-arm cluster tools with wafer residency time constraints | Naiqi Wu, Mengchu Zhou, Yan Qiao | 2018-06-19 |
| 10001773 | Optimal one-wafer scheduling of single-arm multi-cluster tools with tree-like topology | Naiqi Wu, Yan Qiao, Mengchu Zhou | 2018-06-19 |