Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10051693 | Apparatus and method for heating semiconductor wafers via microwaves | Joseph M. Wander, Zakaryae Fathi, Clayton R. DeCamillis, Iftikhar Ahmad | 2018-08-14 | $24,993,000 |