Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10051693 | Apparatus and method for heating semiconductor wafers via microwaves | Zakaryae Fathi, Keith R. Hicks, Clayton R. DeCamillis, Iftikhar Ahmad | 2018-08-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10051693 | Apparatus and method for heating semiconductor wafers via microwaves | Zakaryae Fathi, Keith R. Hicks, Clayton R. DeCamillis, Iftikhar Ahmad | 2018-08-14 |