Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087523 | Vapor delivery method and apparatus for solid and liquid precursors | Joshua Collins, Michal Danek | 2018-10-02 |
| 9951423 | Systems and methods for measuring entrained vapor | — | 2018-04-24 |