Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081869 | Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates | Edward Augustyniak, Akhil Singhal, Kareem Boumatar | 2018-09-25 |
| 10047438 | Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas | Arul N. Dhas, Kareem Boumatar | 2018-08-14 |