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Arul N. Dhas

Lam Research: 1 patents #185 of 426Top 45%
Overall (2018): #482,721 of 503,207Top 100%
1
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
10047438 Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas Kareem Boumatar, Christopher Ramsayer 2018-08-14