Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096447 | Electron beam apparatus with high resolutions | Christopher Sears | 2018-10-09 |
| 10090131 | Method and system for aberration correction in an electron beam system | Christopher Sears | 2018-10-02 |
| 10056224 | Method and system for edge-of-wafer inspection and review | Christopher Sears, Harsh Sinha, David Trease, David Kaz, Wei Ye | 2018-08-21 |
| 9934933 | Extractor electrode for electron source | Laurence S. Hordon, Nikolai Chubun, Luca Grella, Daniel Bui, Kevin Cummings +2 more | 2018-04-03 |
| 9905391 | System and method for imaging a sample with an electron beam with a filtered energy spread | — | 2018-02-27 |
| 9881764 | Heat-spreading blanking system for high throughput electron beam apparatus | Christopher Sears, Douglas A. Larson | 2018-01-30 |