Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060884 | Interleaved acousto-optical device scanning for suppression of optical crosstalk | Jamie M. Sullivan, Yevgeniy Churin, Ralph Johnson, Meier Brender, Mark Wang +2 more | 2018-08-28 |
| 9970883 | Multi-spot scanning collection optics | Jamie M. Sullivan, Ralph Johnson, Evegeny Churin, Yong-Mo Moon | 2018-05-15 |
| 9864173 | Systems and methods for run-time alignment of a spot scanning wafer inspection system | Jamie M. Sullivan, Kai Cao | 2018-01-09 |