Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060884 | Interleaved acousto-optical device scanning for suppression of optical crosstalk | Wenjian Cai, Yevgeniy Churin, Ralph Johnson, Meier Brender, Mark Wang +2 more | 2018-08-28 |
| 9970883 | Multi-spot scanning collection optics | Ralph Johnson, Evegeny Churin, Wenjian Cai, Yong-Mo Moon | 2018-05-15 |
| 9891175 | System and method for oblique incidence scanning with 2D array of spots | Yevgeniy Churin | 2018-02-13 |
| 9864173 | Systems and methods for run-time alignment of a spot scanning wafer inspection system | Wenjian Cai, Kai Cao | 2018-01-09 |