Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151631 | Spectroscopy with tailored spectral sampling | Johannes D. de Veer | 2018-12-11 |
| 10141156 | Measurement of overlay and edge placement errors with an electron beam column array | Frank Laske | 2018-11-27 |