Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141156 | Measurement of overlay and edge placement errors with an electron beam column array | Mark A. Neil | 2018-11-27 |
| 9892885 | System and method for drift compensation on an electron beam based characterization tool | Christopher Sears | 2018-02-13 |