Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133081 | Beam splitter, laser generator and excimer laser annealing apparatus | Xiangjun Tian | 2018-11-20 |
| 10002804 | Method of endpoint detection of plasma etching process using multivariate analysis | Vi Vuong, Serguei Komarov | 2018-06-19 |
| 9970818 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Junwei Bao, Ching-Ling Meng, Holger Tuitje, Mihail Mihaylov, Zheng Yan +2 more | 2018-05-15 |
| 9857558 | Optical imaging lens | Matthew Bone, Bai Na Chen, Feng Chen | 2018-01-02 |