Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002804 | Method of endpoint detection of plasma etching process using multivariate analysis | Yan Chen, Serguei Komarov | 2018-06-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002804 | Method of endpoint detection of plasma etching process using multivariate analysis | Yan Chen, Serguei Komarov | 2018-06-19 |