Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020159 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa | 2018-07-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020159 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa | 2018-07-10 |