Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121640 | Method and apparatus for plasma processing | Satoru Muto, Yasuo Ohgoshi, Hirofumi Eitoku | 2018-11-06 |
| 10090162 | Plasma processing method and plasma processing device | Junya Tanaka | 2018-10-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121640 | Method and apparatus for plasma processing | Satoru Muto, Yasuo Ohgoshi, Hirofumi Eitoku | 2018-11-06 |
| 10090162 | Plasma processing method and plasma processing device | Junya Tanaka | 2018-10-02 |