Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121640 | Method and apparatus for plasma processing | Satoru Muto, Tetsuo Ono, Yasuo Ohgoshi | 2018-11-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121640 | Method and apparatus for plasma processing | Satoru Muto, Tetsuo Ono, Yasuo Ohgoshi | 2018-11-06 |