TM

Takashi Mitsuya

EB Ebara: 1 patents #63 of 140Top 45%
Overall (2018): #220,951 of 503,207Top 45%
1
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
10141211 Substrate processing apparatus and substrate transfer method Toshio Yokoyama, Masahiko Sekimoto, Kenichi Kobayashi, Kenichi Akazawa, Keiichi Kurashina 2018-11-27