Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160013 | Rinsing bath and substrate cleaning method using such rinsing bath | Toshio Yokoyama, Kenichi Kobayashi, Kenichi Akazawa | 2018-12-25 |
| 10141211 | Substrate processing apparatus and substrate transfer method | Toshio Yokoyama, Kenichi Kobayashi, Kenichi Akazawa, Takashi Mitsuya, Keiichi Kurashina | 2018-11-27 |