Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9928994 | Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films | Fayaz Shaikh | 2018-03-27 |
| 9875890 | Deposition of metal dielectric film for hardmasks | Fayaz Shaikh | 2018-01-23 |