Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096475 | System and method for depositing a homogenous interface for PECVD metal-doped carbon hardmasks | — | 2018-10-09 |
| 9928994 | Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films | Sirish Reddy | 2018-03-27 |
| 9875890 | Deposition of metal dielectric film for hardmasks | Sirish Reddy | 2018-01-23 |
| 9859088 | Inter-electrode gap variation methods for compensating deposition non-uniformity | — | 2018-01-02 |