Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157750 | Plasma processing method and plasma processing apparatus | Masahito Mori, Takao Arase, Taku Iwase | 2018-12-18 |
| 9905431 | Dry etching method | Masahito Mori, Takao Arase, Ryuta Machida | 2018-02-27 |