Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966274 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Gon-jun Kim, Sangheon Lee | 2018-05-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966274 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Gon-jun Kim, Sangheon Lee | 2018-05-08 |