Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, David Eldridge, Lin Feng +3 more | 2018-06-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, David Eldridge, Lin Feng +3 more | 2018-06-05 |