Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036964 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Pradeep Vukkadala, Jaydeep Sinha | 2018-07-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036964 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Pradeep Vukkadala, Jaydeep Sinha | 2018-07-31 |